Cathodoluminescence spectroscopy on lamellar metal and semiconductor gratings for nano-photonic devices
نویسندگان
چکیده
Cathodoluminescence spectra of lamellar gratings have Gaussian profiles centered at ~600 nm independent of grating amplitude (0.1 to 4.6 microns), grating period (0.1 to 20 microns), material (metal, semimetal, or semiconductor), or e-beam energy, but the band blue-shifts somewhat with increasing e-beam current. A periodic modulation with wavelength appears for the higher grating amplitudes due to interference from simultaneously-emitting grating bars and grooves separated by 10s of microns, even though the excitation spot size is only ~10 nm. Unstructured surfaces have weak, flat, and featureless spectra, emphasizing the role of the grating in the emission process. Transition radiation and out-coupling of surface plasmons are eliminated on physical grounds as the source of the emission. We favor an e-beam-induced hot-electron current that excites electron hole-pairs over broad areas within the metal film as the most likely mechanism. This work relates to the selection of materials for nano-photonic devices.
منابع مشابه
Cathodoluminescence of conducting gratings and implications for electron-beam investigations of nano-photonic devices
Cathodoluminescence (CL) spectroscopy is performed on conducting 1and 2-dimensional gratings of metals, semimetals and semi-conductors of varying periods from 0.5 to 20 microns for a range of grating amplitudes from 0.1 to 4.6 microns. The overall emission spectrum consists of a 400 nm wide band centered at ~600 nm which depends little on the grating period, grating amplitude, material, e-beam ...
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